In this problem you have to calculate the determinant of an N x N matrix whose entries are given by m[i][j] = gcd(i,j), 1 ≤ i,j ≤ N.

Here gcd(i,j) denotes the greatest common divisor of i and j.

As the determinant D can grow very large, you have to print D%1000003.

Input

First line of input consists of a single integer containing the number of test cases T ( equal to around 500000), each of the following T lines contain an integer N the size of the matrix. N lies between 1 and 2000000 ( both inclusive ).

Output

One line corresponding to each test case containing the determinant modulo 1000003 for the corresponding test case.

Example

Input:
3
1
3
5

Output:
1
2
16